Vacuum valves from LIWO

Fine vacuum valves specially developed for fine vacuum applications.

Technical data:    

• Nominal size: DN 16-4 to 63 ISO KFProduct-specific leak and function test
• Type of actuator: pneumatic / double-acting
• Position sensing: both end positions possible
• Leakage rate: 1x10^-9 mbar*l/s
• Permissible ambient temperature: 5 -70°C
• Materials Housing: aluminium
• Seals: Viton / FPM / FKM
• Weight: 0,25 -3kg