Vacuum valves from LIWO

Fine vacuum valves specially developed for fine vacuum applications.

Technical data:    

  • Nominal size: DN 16-4 to 63 ISO KFProduct-specific leak and function test
  • Type of actuator: pneumatic / double-acting
  • Position sensing: both end positions possible
  • Leakage rate: 1x10-9 mbar*l/s
  • Permissible ambient temperature: 5 -70°C
  • Materials Housing: aluminium
  • Seals: Viton / FPM / FKM
  • Weight: 0,25 -3kg



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